The Uppsala Group had been also ready to undertake deposition of copper steel by ALD working with copper(I) chloride.23 In such cases, the copper steel was deposited on tantalum steel foils, using an evaporation temperature of 350°C in addition to a deposition temperature number of 360°C– 410°C. The growth for https://aldindustry14814.p2blogs.com/21502447/the-definitive-guide-to-ald-techniques